Systems and methods for determining when to trigger an abort process during semiconductor fabrication processing

A system comprising:

• a reaction chamber comprising a susceptor disposed within the reaction chamber;
• a heat lamp disposed outside the reaction chamber and optically coupled to the susceptor by a wall of the reaction chamber;
• and
• a controller for determining when to trigger an abort process during a semiconductor fabrication process, wherein the controller is configured to:
• measure a plurality of resistances of the heat lamp during a time period;
• perform N consecutive comparisons of a prior resistance of the measured plurality of resistances to a current resistance of the measured plurality of resistances, to determine whether a difference between each comparison of the prior resistance and the current resistance exceeds a threshold;
• trigger the abort process based on the difference between each of the N consecutive comparisons of the prior resistance and the current resistance exceeding the threshold;
• and
• based on triggering the abort process, generate one or more instructions to suspend the semiconductor fabrication process.

A controller for determining when to trigger an abort process during a semiconductor fabrication process, comprising:

• one or more processors;
• and
• memory storing computer-executable instructions, that when executed by the one or more processors, cause the controller to, at a reaction chamber comprising a susceptor disposed within the reaction chamber and a heat lamp disposed outside the reaction chamber and optically coupled to the susceptor by a wall of the reaction chamber:
• measure a plurality of resistances of the heat lamp during a time period;
• compare a first resistance of the measured plurality of resistances to a second resistance of the measured plurality of resistances to determine whether a difference between the first resistance and the second resistance exceeds a threshold, and wherein the first resistance is measured prior to the second resistance;
• compare the second resistance to a third resistance of the measured plurality of resistances to determine whether a difference between the second resistance and the third resistance exceeds the threshold, and wherein the second resistance is measured prior to the third resistance;
• trigger the abort process based on:
• the difference between the first resistance and the second resistance exceeding the threshold;
• and
• the difference between the second resistance and the third resistance exceeding the threshold;
• and
• based on triggering the abort process, generate one or more instructions to suspend the semiconductor fabrication process.