Vibration isolation layers, measurement systems that include the vibration isolation layers, and related methods

A measurement system, comprising:

• a vibration isolation layer that includes:
• (i) a platform that defines an upper surface;
• and
• (ii) a plurality of vibration isolation mechanisms positioned to support the platform relative to a mounting region that supports the vibration isolation layer, wherein the plurality of vibration isolation mechanisms is configured to permit relative motion between the platform and the mounting region to vibrationally isolate the platform from the mounting region;
• and
• a supported assembly supported by the upper surface of the platform, wherein the supported assembly includes a measurement layer configured to test a device under test (DUT) formed on a substrate, wherein the supported assembly includes an optical measurement layer configured to optically test the DUT, wherein the optical measurement layer further includes an optical measurement layer controller programmed to control the operation of the optical measurement layer, and further wherein the optical measurement layer controller also is programmed to control the operation of the vibration isolation layer.

A method of installing a measurement system configured to test a device under test (DUT) that is formed on a substrate, the method comprising:

• positioning, within a mounting region, a vibration isolation layer, wherein the vibration isolation layer includes a platform, and further wherein the vibration isolation layer is configured to vibrationally isolate the platform from the mounting region;
• positioning, on an upper surface of the platform, a supported assembly, wherein the supported assembly includes a probe station and an optical measurement layer configured for optical communication with the DUT, wherein the optical measurement layer includes an optical measurement layer controller, and further wherein the positioning the supported assembly includes positioning the probe station and the optical measurement layer on the upper surface;
• vibrationally isolating the supported assembly from the mounting region via the vibration isolation layer;
• and
• controlling the operation of the vibration isolation layer utilizing the optical measurement layer controller.