Substrate, package, gas sensor module, gas sensor, and method for manufacturing gas sensor
AssigneeKYOCERA Corporation
InventorKoutarou NAKAMOTO
Life of this patent
Estimating the term…
Abstract
To simplify and miniaturize the structure of a gas sensor. The substrate includes a base including a plurality of insulation layers made of a ceramic material and including a first surface and a second surface located on a side opposite to the first surface, a gas sensitive body region located on the first surface and in which a gas sensitive body is disposed, an electrode wiring located in the gas sensitive body region and connected to the gas sensitive body, a heater located between the insulation layers and located overlapping the gas sensitive body region in a perspective plan view, and an external electrode electrically connected to the electrode wiring or the heater.
Claims18
A substrate comprising:
- a base comprising a plurality of insulation layers made of a ceramic material and comprising a first surface and a second surface located on a side opposite to the first surface;
- a gas sensitive body region located on the first surface and in which a gas sensitive body is disposed;
- an electrode wiring located in the gas sensitive body region and connected to the gas sensitive body;
- a heater located between the insulation layers and located overlapping the gas sensitive body region in a perspective plan view;
- and
- an external electrode electrically connected to the electrode wiring or the heater.
Dependencies are inferred from the claim text.