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US 2026/0287531 A1Published application
Methods for quantifying precursor compounds and related systems and related compositions
AssigneeEntegris, Inc.
InventorDrew Michael Hood
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Abstract
Methods useful for quantifying an alkyl aluminum compound using aluminum amidinate, and related systems and related compositions are provided. The method comprises contacting a composition comprising a reaction product and an alkyl aluminum compound, with a carbodiimide compound, to form an aluminum amidinate. The carbodiimide compound selectively reacts with the alkyl aluminum compound over the reaction product. The method comprises analyzing the composition using 1H NMR to determine a purity of the reaction product.
Claims21
A method comprising:
- contacting a composition comprising a reaction product and an alkyl aluminum compound, with a carbodiimide compound, to form an aluminum amidinate,
- wherein the carbodiimide compound selectively reacts with the alkyl aluminum compound over the reaction product;
- and
- analyzing the composition to determine a purity of the reaction product.
1 more element
A method comprising:
- contacting an alkyl aluminum compound with a reagent to form a composition comprising a reaction product and an unreacted alkyl aluminum compound;
- contacting the composition with a carbodiimide compound to form an aluminum amidinate,
- wherein the carbodiimide compound selectively reacts with the unreacted alkyl aluminum compound over the reaction product;
- and
- analyzing the composition to determine a purity of the reaction product.
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A composition comprising:
- an aluminum precursor,
- wherein the aluminum precursor comprises a compound of the formula:
- where:
- each R is independently an alkyl;
- 5% by weight or less of an alkyl aluminum compound based on a total weight of the composition.
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An article comprising:
- a substrate,
- wherein the substrate has:
- a first surface portion comprising a metal;
- and
- a second surface portion comprising a non-metal;
- and
- a layer,
- wherein the layer comprises a reaction product,
- wherein the reaction product comprises a compound of the formula:
- where:
- each R is independently an alkyl;
- and
- wherein the layer is located on the second surface portion.
10 more elements
Dependencies are inferred from the claim text.