Reliable non-destructive determination of sample parameter values

Abstract

The invention relates to a photoelectron spectrometer (100) comprising a sample value determining module (50) and to a method for determining the value of at least one of n sample parameters at a measuring point (22) of a sample (20) on the basis of photoemission measurements without having to destroy the sample (20) during the photoemission measurements. Values for at least one and up to n-1 sample parameters are obtained from the quantity of n sample parameters at the measuring point (22) of the sample (20) and multiple photoemission spectra from the measuring point (22) of the sample (20), said photoemission spectra being captured using different levels of excitation energy. The value of the at least one sample parameter at the measuring point (22) of the sample (20) is determined on the basis of the values of the up to n-1 sample parameters and the photoemission spectra.

Dependencies are inferred from the claim text.