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US 2026/0287528 A1Published application
Extended range active illumination imager
AssigneeNexGen Semi Holding, Inc.
InventorsMichael John Zani, Mark Joseph Bennahmias
Life of this patent
Estimating the term…
Abstract
A particle beam illuminating system includes a beam steering control subsystem configured to receive charged particles and to generate and scan a particle beam over at least a portion of a target located a distance of at least 10 meters from the beam steering control subsystem. The system further includes a beam charge control subsystem configured to receive the particle beam from the beam steering control subsystem and to control an output charge of the particle beam impinging the target.
Claims81
A system comprising:
- a charged particle beamline configured to project, focus, and control a particle beam;
- and
- a beam charge reducer subsystem configured to reduce an output charge of the particle beam.
Dependencies are inferred from the claim text.