Monitoring system, operating method of monitoring system, and foreign substance filtering system

An operating method of a monitoring system, comprising:

• collecting a foreign substance from a manufacturing component using a filter;
• radiating a visible light laser onto the foreign substance collected on a surface of the filter using a laser radiator;
• generating a laser radiation image by photographing the foreign substance exposed to the visible light laser using an image sensor;
• and
• image processing the laser radiation image to acquire detection information of the foreign substance.

A foreign substance filtering system comprising:

• a transport system configured to transport a manufacturing component;
• and
• a monitoring system configured to filter a foreign substance from the manufacturing component and monitor detection information of the foreign substance,
• wherein the monitoring system includes:
• a filter configured to collect the foreign substance from the manufacturing component;
• a laser radiator configured to radiate a visible light laser onto the foreign substance collected on a surface of the filter;
• an image sensor configured to generate a laser radiation image by photographing the foreign substance exposed to the visible light laser;
• and
• a processor configured to image process the laser radiation image to acquire detection information of the foreign substance.