Optical apparatus, optical inspection apparatus, and optical inspection method
AssigneeKabushiki Kaisha Toshiba
InventorHiroshi Ohno
Life of this patent
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Abstract
According to an embodiment, an optical apparatus includes: a light receiving element, a light-collecting element array, a diaphragm aperture array, and a first light transmission portion. The light receiving element is configured to receive light and is configured to convert the light into a signal. The light-collecting element array has at least two or more repeating structures. The diaphragm aperture array has at least two or more repeating structures on a focal plane of the light-collecting element array between the light-collecting element array and the light receiving element. The first light transmission portion is filled between the diaphragm aperture array and the light-collecting element array and is configured to transmit the light.
Claims16
An optical apparatus comprising:
- a light receiving element configured to receive light and convert the light into a signal;
- a light-collecting element array having at least two or more repeating structures;
- a diaphragm aperture array having at least two or more repeating structures on a focal plane of the light-collecting element array between the light-collecting element array and the light receiving element;
- and
- a first light transmission portion that is filled between the diaphragm aperture array and the light-collecting element array and is configured to transmit the light.
An optical inspection method comprising:
- emitting a beam with a spectrum containing a first wavelength from a beam irradiation portion;
- detecting, by an optical apparatus facing the beam irradiation portion, the spectrum of the beam;
- and
- detecting a change in a medium from the beam irradiation portion to the optical apparatus from a characteristic of the light of the first wavelength received by the optical apparatus.
Dependencies are inferred from the claim text.