Microscope spectrometer for non-destructive testing of photonic integrated circuits
AssigneePhotonic Inc.
InventorsMohsen KESHAVARZ AKHLAGHI, Gary WOLFOWICZ
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Abstract
A system for testing photonic devices includes a magnifying imaging system, and an optical system arranged to deliver a test light beam from a test light source to an optical port of the photonic device. The optical system is arranged to collect reflected and/or transmitted response light emitted at one or more locations on the photonic circuit. The response light is detected at one or more detectors. The test light source may include a narrow bandwidth variable wavelength laser. The system may be applied to accurately measure functionality, for example resonant wavelengths, of elements of the photonic device.
Claims29
A system for testing a device under test (DUT) that is moveable relative to an objective lens, the system comprising:
- a first optical system, the first optical system comprising:
- a viewer configured to observe the DUT when illuminated by an illumination light, emitted by a light source, through the objective lens;
- and,
- a second optical system, the second optical system comprising:
- optical elements configured to deliver a test light beam, emitted from a test light source, to be incident onto the DUT through the objective lens wherein the test light beam is transmitted and/or reflected as a transmitted and/or reflected response light upon being incident on the DUT;
- one or more detectors configured to detect the transmitted and/or reflected response light from the DUT.
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Dependencies are inferred from the claim text.