Sensor for measuring a pressure and process for manufacturing said sensor

A process for manufacturing a sensor for measuring a pressure introduced to the sensor, the process comprising the following steps:

• providing an inner housing part that elongates about a longitudinal axis and is hollow, wherein the inner housing part includes a housing wall that defines an inside that delimits a cavity disposed in a direction radially from the inside of the housing wall to the longitudinal axis, wherein the housing wall defines an outside disposed spaced apart from the inside in a direction radially from the longitudinal axis, wherein the housing wall is delimited along the axial direction by a first housing end and a second housing end spaced apart along the longitudinal axis from the first housing end, wherein the inner housing part defines an axial opening at the first housing end and the cavity extends through the axial opening at the first housing end;
• providing a measuring unit that is configured to operate according to a piezoresistive measuring principle and accordingly to generate at least one measurement signal under the effect of the pressure introduced to the sensor;
• inserting the measuring unit into the cavity in the longitudinal direction through the axial opening at the first housing end;
• wherein the housing wall defines a plurality of radial openings, each of the plurality of radial openings configured to extend in the radial direction from the outside of the inner housing part to the measuring unit within the cavity;
• providing a diaphragm element that is configured to conduct the pressure introduced to the sensor to measuring unit;
• securing the diaphragm element to the first housing end;
• providing a feedthrough configured to conduct the at least one measurement signal from the cavity to the outside of the inner housing part;
• securing feedthrough to the second housing end in a manner that closes up the cavity in the direction along the longitudinal axis;
• disposing a plurality of conductor elements into the cavity adjacent the measuring unit via the plurality of radial openings;
• and
• inserting a bonding tool through at least one of the plurality of radial openings to electrically connect the measuring unit to the feedthrough via at least one of the plurality of conductor elements.