Three-electrode sensor integrating positioning and pressure detection and manufacturing method therefor

A three-electrode sensor integrating positioning and pressure detection, comprising a resistance positioning unit, two spacers, a piezoelectric unit, and an encapsulation layer connected in sequence;

• wherein the resistance positioning unit is configured to detect a position subjected to force;
• upper portions of the two spacers are connected to edges of the resistance positioning unit, and lower portions of the two spacers are connected to edges of the piezoelectric unit, with the resistance positioning unit and the piezoelectric unit forming a cavity structure;
• and the piezoelectric unit is configured to detect a magnitude of force applied, wherein
• the resistance positioning unit comprises an insulating layer, a resistance-sensitive layer, and an upper electrode;
• the resistance-sensitive layer is arranged on a lower surface of the insulating layer, and the upper electrode is arranged on a lower surface of the resistance-sensitive layer;
• the piezoelectric unit comprises a middle electrode layer, a piezoelectric layer, and a lower electrode layer connected in sequence;
• when the insulating layer of the sensor is subjected to force and deforms, the resistance-sensitive layer contacts the middle electrode layer, forming a conduction path among the upper electrode, the resistance-sensitive layer, and the middle electrode layer, wherein a resistance value of the resistance-sensitive layer is detected, and position information of a force point is determined;
• and the upper electrode and the middle electrode layer collect resistance signals, the middle electrode layer and the lower electrode layer collect voltage signals, the middle electrode layer serves as a common working electrode for the resistance positioning unit and the piezoelectric unit, and the upper electrode and the lower electrode layer are respectively connected independently to the resistance positioning unit and the piezoelectric unit, realizing separate detection of spatial position and pressure information of external stimuli.