US 2026/0287437 A1 · ELECTROMAGNETIC WAVE SENSOR

Abstract

An electromagnetic wave sensor comprises a first wiring that extends in a first direction, two second wirings that are separated by an interspace in the first direction and that extend in a second direction that is different from the first direction, and a bolometer. The bolometer includes electrodes. The first wiring is positioned on a side where electromagnetic waves to be measured are incident, relative to the bolometer. The position of the bolometer in a third direction that is orthogonal to the first direction and the second direction is between the position of the first wiring in the third direction and the position of the second wirings in the third direction. When viewed from the third direction, at least a part of the electrodes overlaps the interspace, and the bolometer overlaps the two second wirings.

Claims7

Dependent claims

An electromagnetic wave sensor, comprising:

a first wiring that extends in a first direction;
two second wirings that are separated by an interspace in the first direction and that extend in a second direction that is different from the first direction;
and
a bolometer that includes electrodes, wherein
the first wiring is positioned on a side where electromagnetic waves to be measured are incident, relative to the bolometer, and position of the bolometer in a third direction that is orthogonal to the first direction and the second direction is between position of the first wiring in the third direction and position of the second wirings in the third direction,
when viewed from the third direction, at least a part of the electrodes overlaps the interspace, and
when viewed from the third direction, the bolometer overlaps the two second wirings.

4 more elements

Dependencies are inferred from the claim text.

Electromagnetic wave sensor

Life of this patent

Electromagnetic wave sensor

Life of this patent

Abstract

Claims7