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AssigneeSK hynix Inc.
InventorsHeon Yong CHANG, Byung In KANG, Myoung Hoon KWON, Dong Seob YUN
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According to embodiments of the present disclosure, a method of determining a misalignment of a semiconductor device including contacts arranged in a first direction and a second direction intersecting the first direction, and wirings connected to at least one of the contacts and spaced apart from each other in the first direction may include measuring a first spacing between a first contact and a second contact neighboring each other in the first direction among the contacts, measuring a second spacing between a side surface of a first wiring among the wirings and a side surface of the first contact, wherein the first wiring is connected to the first contact, and determining whether there is a misalignment based on the first spacing and the second spacing.
A method of determining a misalignment of a semiconductor device including contacts arranged in a first direction and a second direction intersecting the first direction, and wirings connected to at least one of the contacts and spaced apart from each other in the first direction, the method comprising:
A method of determining a misalignment of a semiconductor device including a first contact and a second contact, disposed spaced apart from each other by a first spacing in a first direction and a first wiring connected to the first contact, the first wiring having side surfaces facing each other in the first direction, the method comprising:
Dependencies are inferred from the claim text.