US 2026/0287333 A1 · CONTOUR SHAPE MEASURING DEVICE AND METHOD

Abstract

The present invention relates to a contour shape measuring device and a method for measuring a contour shape in a disk-shaped measurement target object having a beveled peripheral edge portion, in which the contour shape is measured as a shadow contour shape on the basis of a shadow image obtained by imaging a shadow of the peripheral edge portion generated by applying light onto the peripheral edge portion from a tangential direction of an outer periphery, the contour shape of the peripheral edge portion is measured as an optical contour shape by measuring a distance to the measurement target object using light from a surface direction, and the contour shape is obtained on the basis of the shadow contour shape and the optical contour shape.

Claims12

Dependent claims

A contour shape measuring device that measures a contour shape in a disk-shaped measurement target object having a beveled peripheral edge portion, the contour shape measuring device comprising:

a shadow contour shape measuring unit that measures the contour shape as a shadow contour shape on a basis of a shadow image obtained by imaging a shadow of the peripheral edge portion generated by applying light onto the peripheral edge portion from a tangential direction of an outer periphery;
an optical contour shape measuring unit that measures the contour shape of the peripheral edge portion as an optical contour shape by measuring a distance to the measurement target object using light from a surface direction;
and
a contour shape calculating unit that obtains the contour shape on a basis of a shadow contour shape measured by the shadow contour shape measuring unit and an optical contour shape measured by the optical contour shape measuring unit.

1 more element

A contour shape measuring method for measuring a contour shape in a disk-shaped measurement target object having a beveled peripheral edge portion, the contour shape measuring method comprising:

a shadow contour shape measuring process of measuring the contour shape as a shadow contour shape on a basis of a shadow image obtained by imaging a shadow of the peripheral edge portion generated by applying light onto the peripheral edge portion from a tangential direction of an outer periphery;
an optical contour shape measuring process of measuring the contour shape of the peripheral edge portion as an optical contour shape by measuring a distance to the measurement target object using light from a surface direction;
and
a contour shape calculating process of obtaining the contour shape on a basis of a shadow contour shape measured by the shadow contour shape measuring process and an optical contour shape measured by the optical contour shape measuring process.

1 more element

Dependencies are inferred from the claim text.

Contour shape measuring device and method

Life of this patent

Contour shape measuring device and method

Life of this patent

Abstract

Claims12