Measurement processing apparatus, measurement method, and storage medium

A measurement method comprising:

• obtaining a spectrum of observed light produced from a sample as the sample is irradiated with measurement light;
• extracting, as a candidate group, one or more data sets each including a spectrum similar to the spectrum of the observed light with reference to a database including one or more data sets each including at least a film model, an analysis condition, and a spectrum;
• with regard to each of the one or more data sets in the candidate group, fitting parameters of a model formula determined based on the film model in the data set in accordance with the analysis condition in the data set so that a spectrum calculated based on the model formula matches the spectrum of the observed light, thereby calculating a measurement result including a film thickness of each layer of the sample;
• and
• determining a film thickness of each layer of the sample based on one or more of measurement results calculated for the data sets in the candidate group.

A non-transitory computer-readable storage medium storing instructions that, when executed by one or more processors, cause the one or more processors to perform the operations comprising:

• obtaining a spectrum of observed light produced from a sample as the sample is irradiated with measurement light;
• extracting, as a candidate group, one or more data sets each including a spectrum similar to the spectrum of the observed light with reference to a database including one or more data sets each including at least a film model, an analysis condition, and a spectrum;
• with regard to each of the one or more data sets in the candidate group, fitting parameters of a model formula determined based on the film model in the data set in accordance with the analysis condition in the data set so that a spectrum calculated based on the model formula matches the spectrum of the observed light, thereby calculating a measurement result including a film thickness of each layer of the sample;
• and
• determining a film thickness of each layer of the sample based on one or more of measurement results calculated for the data sets in the candidate group.