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US 2026/0287207 A1Published application
Clamshell heater
AssigneeASM IP Holding B.V.
InventorsJad Yaacoub, Matthew Ricketts
Life of this patent
Estimating the term…
Abstract
Various embodiments of the present technology provide a system, comprising an upper shell configured to couple to a lower shell to at least partially define an interior volume, a conduit disposed within the interior volume, a heater rod disposed adjacent to the conduit, and an insulation block in thermal contact with the conduit.
Claims20
A system, comprising:
- an upper shell configured to couple to a lower shell to at least partially define an interior volume;
- a conduit disposed within the interior volume;
- a heater rod disposed adjacent to the conduit;
- and
- an insulation block in thermal contact with the conduit.
2 more elements
A system comprising:
- a precursor vessel and a reaction vessel, the precursor vessel and reaction vessel in fluid communication via a precursor conduit,
- a condensation prevention system at least partially surrounding the precursor conduit, the condensation prevention system comprising:
- an upper shell configured to couple to a lower shell to at least partially define an interior volume;
- a conduit disposed within the interior volume;
- a heater rod disposed adjacent to the precursor conduit;
- and
- an insulation block in thermal contact with the conduit.
4 more elements
A method of assembling a condensation prevention system comprising:
- sliding an upper shell relative to a lower shell to at least partially define an interior volume, wherein the upper shell comprises a first upper portion parallel to a second upper portion, wherein the first upper portion and the second upper portion are connected via a third upper portion, the third upper portion normal to the first upper portion and the second upper portion, wherein the lower shell comprises a first lower portion parallel to a second lower portion, wherein the first lower portion and the second lower portion are connected via a third lower portion, the third lower portion normal to the first lower portion and the second lower portion;
- and
- disposing a heater rod into the interior volume.
Dependencies are inferred from the claim text.