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AssigneeASML Netherlands B.V.
InventorsPeter Danny VAN VOORST, Yury KROT, Jacob SONNEVELD, Hendrikus Robertus Marie VAN GREEVENBROEK, Markus Franciscus Antonius EURLINGS
Estimating the term…
Disclosed is an illumination configuration module comprising: a radiation modulation device being operable to receive spectrally dispersed broadband input radiation on an active area and to selectively diffract a diffracted fraction of said spectrally dispersed broadband input radiation to obtain spectrally configured radiation comprising desired diffracted radiation and nuisance diffracted radiation; and at least one spectral filter operable to substantially block a spectral portion of said spectrally configured radiation, the spectral portion comprising said nuisance diffracted radiation.
1-15. (canceled)
An illumination configuration module comprising:
A method of spectrally configuring broadband input radiation to obtain spectrally configured radiation, the method comprising:
Dependencies are inferred from the claim text.