Valves for mass flow controllers
AssigneeIllinois Tool Works Inc.
InventorsMichael Rodriguez, Walter Dennis Robertson, III, Benjamin Kunrath
Life of this patent
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Abstract
A disclosed example valve for a mass flow controller is provided. The valve includes a coil, a central stem surrounded by the coil, and a housing to contain the coil and the central stem. A plunger having a first end arranged within the central stem and surrounded by the coil, and a second end is configured to mate with an orifice block within a base of a flow body in a first closed position, wherein an airgap is formed between a surface of the second end of the plunger and a base of the central stem.
Claims21
A valve for a mass flow controller, comprising:
- a coil;
- a central stem surrounded by the coil;
- a housing to contain the coil and the central stem;
- and
- a plunger having a first end arranged within the central stem and surrounded by the coil, and a second conical end configured to mate with an orifice land area an orifice block within a base of a flow body in a first closed position,
- wherein an airgap is formed between a surface of the second conical end of the plunger and a base of the central stem.
A valve for a mass flow controller, comprising:
- a coil;
- a central stem surrounded by the coil;
- a housing to contain the coil and the central stem;
- and
- a plunger having a first end arranged within the central stem and surrounded by the coil, and a second end with a elastomeric extension,
- wherein the elastomeric extension is configured to mate with an orifice land area of an orifice block to in a first closed position.
(canceled)
Dependencies are inferred from the claim text.