Vacuum pump and stator disc
AssigneeEdwards Japan Limited
InventorsKenta Kataoka, Shigeyoshi Nakatsuji
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AssigneeEdwards Japan Limited
InventorsKenta Kataoka, Shigeyoshi Nakatsuji
Estimating the term…
Provided is a turbo molecular pump 100 that includes an outer cylinder, a rotor shaft that is rotatably supported inside the outer cylinder, a plurality of rotor discs that rotate together with the rotor shaft, and a plurality of stator discs that are alternately arranged between the plurality of rotor discs, the turbo molecular pump exhausting gas by interaction between the plurality of rotor discs and the plurality of stator discs, wherein the plurality of stator discs include a first stator disc and a second stator disc that is adjacent to the first stator disc in an axial direction, the first stator disc has an outer peripheral side protruding portion that contacts the second stator disc to perform positioning in the axial direction, and the outer peripheral side protruding portion has a spatial portion that is provided between the outer peripheral side protruding portion and the second stator disc.
A vacuum pump comprising:
A stator disc arranged between a plurality of rotor discs that rotate together with a rotating shaft of a vacuum pump, wherein
Dependencies are inferred from the claim text.