Crucible and method of manufacturing the same
AssigneeSec Carbon, Limited
InventorsTomoki YAMAGUCHI, Tokujiro NISHIKIORI, Hiromu SHIOMI, Masahide WATANABE, Manabu ODAGAKI, Shinnosuke SONE
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AssigneeSec Carbon, Limited
InventorsTomoki YAMAGUCHI, Tokujiro NISHIKIORI, Hiromu SHIOMI, Masahide WATANABE, Manabu ODAGAKI, Shinnosuke SONE
Estimating the term…
A crucible with higher growth rate of SiC single crystals and a method of manufacturing the same are provided. A crucible 10 is a crucible to be used to manufacture an SiC single crystal by the sublimation method, including: a bottom 120; a side wall 122 provided to extend upward from a peripheral edge of the bottom 120; and a lid 16 placed over the top of the side wall 122. The bottom 120, side wall 122, and lid 16 are formed from graphite. The crucible 10 has a vertical thermal conductivity VT along a vertical direction in which the side wall 122 extends, and a lateral thermal conductivity LT along a lateral direction perpendicular to the vertical direction. The vertical thermal conductivity VT is higher than the lateral thermal conductivity LT.
A crucible to be used to manufacture an SiC single crystal by a sublimation method, comprising:
A method of manufacturing a crucible to be used to manufacture an SiC single crystal by a sublimation method, the method comprising:
Dependencies are inferred from the claim text.