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US 2026/0286566 A1Published application
Substrate processing apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorsKeita ISEKI, Hiroyuki YASHIKI, Hajime NISHIDE, Ken TERAI
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Abstract
A substrate processing apparatus according to the present invention includes an auxiliary robot that conveys a liquid-filled substrate. The auxiliary robot includes a hand approaching from above the substrate when supporting the substrate. The hand includes a hand body, and a plurality of support members that extends downward from the hand body and is in contact with a lower surface of the substrate away from a peripheral edge of the substrate to support the substrate.
Claims10
A substrate processing apparatus comprising an auxiliary robot configured to convey a liquid-filled substrate,
- wherein
- the auxiliary robot includes an upper hand approaching from above the substrate when supporting the substrate, and
- the upper hand includes:
- an upper hand body;
- and
- a plurality of support members extending downward from the upper hand body and contacting a lower surface of the substrate away from a peripheral edge of the substrate to support the substrate.
3 more elements
Dependencies are inferred from the claim text.