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US 2026/0286565 A1Published application
Surface finishing of internal geometries for manifolds
AssigneeLam Research Corporation
InventorsWilliam Lafferty, Pratima G.N. Rao
Life of this patent
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Abstract
At least one implementation describes an electropolishing apparatus comprising a cathode having a width and a length. In at least one implementation, a dielectric is around cathode. In at least one implementation, the dielectric extends at least partially along the length of cathode. In at least one implementation, cathode comprises a superelastic metal alloy. In at least one implementation, the dielectric comprises a functionally graded material.
Claims28
An electropolishing apparatus, comprising:
- a cathode, wherein the cathode has a length and a diameter;
- and
- a dielectric around the cathode, wherein the dielectric extends at least partially along the length of the cathode, wherein the cathode comprises a superelastic metal alloy.
A system, comprising:
- a metal tubing;
- and
- an electropolishing apparatus comprising:
- a cathode, wherein the cathode has a length;
- and
- a dielectric around the cathode, wherein the dielectric extends at least partially along the length of the cathode, wherein the cathode comprises an elastic metal alloy, and wherein the dielectric comprises a functionally graded material,
- wherein a cathode assembly comprises the cathode and the dielectric, wherein the cathode assembly is positioned within the metal tubing.
4 more elements
A method, comprising:
- providing an electropolishing apparatus, wherein the electropolishing apparatus comprises:
- a cathode, wherein the cathode has a length;
- and
- a dielectric around the cathode, wherein the dielectric extends at least partially along the length of the cathode, wherein the cathode comprises an elastic metal alloy and the dielectric comprises a functionally graded material, wherein a cathode assembly comprises the cathode and the dielectric, wherein the method further comprises:
- inserting the cathode assembly into a tubing, wherein the tubing comprises one or more bends;
- and
- agitating an electrolyte in the tubing.
4 more elements
Dependencies are inferred from the claim text.