Electrolytic sulfuric acid supply apparatus

An electrolytic sulfuric acid supply apparatus comprising:

• a generation tank storing a sulfuric acid-containing solution containing sulfuric acid;
• a temperature control circulation pipe including a common circulation pipe and a temperature control separate pipe, the common circulation pipe having an upstream end connected to the generation tank, the temperature control separate pipe connecting a downstream end of the common circulation pipe and the generation tank;
• an electrolytic circulation pipe including the common circulation pipe and an electrolytic separate pipe, the electrolytic separate pipe connecting the downstream end of the common circulation pipe and the generation tank;
• a liquid feeder and a heater arranged in the common circulation pipe;
• a temperature control circulation valve disposed in the temperature control separate pipe;
• a filter and a cooler arranged in the electrolytic separate pipe;
• an electrolytic cell disposed downstream of the cooler in the electrolytic separate pipe, the electrolytic cell electrolyzing the sulfuric acid-containing solution;
• a first temperature sensor disposed in the common circulation pipe, the first temperature sensor measuring a temperature of the sulfuric acid-containing solution;
• and
• a second temperature sensor disposed between the cooler and the electrolytic cell in the electrolytic separate pipe, the second temperature sensor measuring the temperature of the sulfuric acid-containing solution.