Graphene synthesis system
AssigneeDestination 2D Inc.
InventorsKaustav Banerjee, Ravi Iyengar, Nalin Rupesinghe, Satish Sundar
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Abstract
A graphene synthesis system includes a transfer chamber configured to transport a substrate. One or more deposition chambers are coupled to the transfer chamber. The one or more deposition chambers are configured to deposit a nickel catalyst layer and an amorphous carbon layer on the substrate. A reactor chamber is coupled to the transfer chamber. The reactor chamber is configured to apply a pressure and a temperature to the substrate to drive diffusion of carbon through the nickel catalyst layer to form a multilayer graphene at a surface of the substrate.
Claims24
A graphene synthesis system comprising:
- a transfer chamber configured to transport a substrate;
- one or more deposition chambers coupled to the transfer chamber,
- wherein the one or more deposition chambers are configured to deposit a nickel catalyst layer and an amorphous carbon layer on the substrate;
- and
- a reactor chamber coupled to the transfer chamber,
- wherein the reactor chamber is configured to apply a pressure and a temperature to the substrate to drive diffusion of carbon through the nickel catalyst layer to form multilayer graphene at a surface of the substrate.
A graphene synthesis system comprising:
- a transfer chamber,
- wherein the transfer chamber includes a robot;
- one or more deposition chambers coupled to the transfer chamber;
- a reactor chamber coupled to the transfer chamber;
- a controller configured to direct transfer of a substrate through the transfer chamber of the graphene synthesis tool to the one or more deposition chambers via the robot, to control a deposition process in the one or more deposition chambers to deposit a nickel catalyst layer and an amorphous carbon layer on the substrate, the controller further configured to direct transfer of the substrate through the transfer chamber to the reactor chamber via the robot, and to control a pressure and a temperature applied to the substrate in the reactor chamber, for a specified duration, to drive diffusion of carbon through the nickel catalyst layer and form multilayer graphene at a surface of the substrate.
A graphene synthesis system, comprising:
- a transfer chamber configured to transport a substrate;
- at least one process chamber coupled to the transfer chamber;
- a controller configured to direct a deposition process in the at least one process chamber to deposit a nickel catalyst layer and an amorphous carbon layer on the substrate, the controller further configured to direct a diffusion process by controlling a pressure and a temperature applied to the substrate in the at least one process chamber, for a specified duration, to drive diffusion of carbon through the nickel catalyst layer and form multilayer graphene at a surface of the substrate.
Dependencies are inferred from the claim text.