Multilayer ald coating for critical components in process chamber
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRen-Guan Duan, Chen-Hsiang Lu, Chiun-Da Shiue, Chih-Kai Hu
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Abstract
A protective coating on a surface of an article includes a first coating that includes an amorphous rare earth metal-containing oxide contacting a surface of the article; and a plurality of composite layers, where each composite layer includes an amorphous rare earth metal-containing oxide layer on an amorphous alumina layer. The coating also includes a second coating comprising a crystalline rare earth metal oxide on the first coating; a third coating comprising amorphous rare earth metal-containing oxide on the second coating; and a fourth coating comprising a crystalline rare earth metal oxide on the third coating.
Claims20
An article, comprising a protective coating on a surface of an article body, wherein the protective coating comprises:
- a first coating on the surface of the article body, the first coating comprising amorphous rare earth metal-containing oxide formed by a first atomic layer deposition (ALD) process and characterized by a first thickness, the first coating comprising a first number of layers of a composite layer including an amorphous rare earth metal-containing oxide layer on an amorphous alumina layer;
- a second coating on the first coating, the second coating comprising crystalline rare earth metal-containing oxide formed by a second atomic layer deposition (ALD) process, the second coating characterized by a second thickness;
- a third coating on the second coating, the third coating comprising amorphous rare earth metal-containing oxide formed by a third atomic layer deposition (ALD) process, and characterized by a third thickness, the third coating comprising a second number of layers of a composite layer including an amorphous rare earth metal-containing oxide layer on an amorphous alumina layer;
- and
- a fourth coating on the third coating, the fourth coating comprising crystalline rare earth metal-containing oxide formed by a fourth atomic layer deposition (ALD) process and characterized by a fourth thickness.
A protective coating on a surface of an article, the protective coating comprising:
- a first coating comprising:
- an amorphous rare earth metal-containing oxide contacting a surface of the article;
- and
- a plurality of composite layers, wherein each composite layer includes an amorphous rare earth metal-containing oxide layer on an amorphous alumina layer;
- a second coating comprising a crystalline rare earth metal oxide on the first coating;
- a third coating comprising amorphous rare earth metal-containing oxide on the second coating;
- and
- a fourth coating comprising a crystalline rare earth metal oxide on the third coating.
A protective coating on a surface of an article, the protective coating comprising:
- a first coating directly on a surface of the article, the first coating comprising amorphous yttrium aluminate;
- a second coating on the first coating, the second coating comprising crystalline yttria;
- a third coating on the second coating using a third ALD process, the third coating comprising amorphous yttrium aluminate, wherein a ratio of a thickness of the first coating to a thickness of the third coating is between about 100 and about 150;
- and
- a fourth coating on the third coating, the fourth coating comprising crystalline yttria.
Dependencies are inferred from the claim text.