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US 2026/0286512 A1Published application
Using Polypeptoids for Deposition and Area-Selective Deposition of Metal Oxides
AssigneeThe Regents of the University of California
InventorsBeihang Yu, Ricardo Ruiz
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Abstract
This disclosure provides systems, methods, and apparatus related to using polypeptoids for deposition and area-selective deposition of metal oxides. In one aspect a method includes depositing polypeptoids on a substrate material. An oxide is deposited on and within the polypeptoids with a precursor. The precursor is chemisorbed to the polypeptoids.
Claims21
A method comprising:
- depositing polypeptoids on a substrate material;
- and
- depositing an oxide on and within the polypeptoids with a precursor, the precursor being chemisorbed to the polypeptoids.
A method comprising:
- depositing a blocking species on a substrate;
- patterning the blocking species to generate a pattern of the blocking species on the substrate;
- depositing first polypeptoids on exposed areas of the substrate not having the blocking species disposed thereon;
- and
- depositing a first oxide on and within the first polypeptoids with a first precursor, the first precursor being chemisorbed to the first polypeptoids.
2 more elements
21-34. (canceled)
Dependencies are inferred from the claim text.