Device, control device and method for laser-induced arc evaporation

A method, comprising:

• controlling an excitation source according to an operating sequence;
• controlling an electrical power source according to the operating sequence;
• wherein the operating sequence comprises a plurality of phases, in each phase thereof:
• an excitation pulse directed at a target is generated by the excitation source to excite a plasma discharge at the target;
• a first electrical power pulse is generated by the electrical power source to electrically supply the plasma discharge by the target;
• and,
• a second electrical power pulse is generated by the electrical power source to accelerate a stream of material released from the target by the plasma discharge away from the target and toward a substrate holder;
• wherein the plurality of phases comprise one or more than one first phase, in which the first electrical power pulse and an electrical current pulse associated with the second electrical power pulse overlap each other only partially.

A non-transitory storage medium storing instructions configured, when executed by a processor, to cause the processor to perform the following:

• controlling an excitation source according to an operating sequence;
• controlling an electrical power source according to the operating sequence;
• wherein the operating sequence comprises a plurality of phases,
• in each phase thereof:
• an excitation pulse directed at a target is generated by the excitation source to excite a plasma discharge at the target;
• a first electrical power pulse is generated by the electrical power source to electrically supply the plasma discharge by the target;
• and,
• a second electrical power pulse is generated by the electrical power source to accelerate a stream of material released from the target by the plasma discharge away from the target and toward a substrate holder;
• wherein the plurality of phases comprise one or more than one first phase, in which the first electrical power pulse and an electrical current pulse associated with the second electrical power pulse overlap each other only partially.

A device comprising one or more processors configured to perform to perform the following:

• controlling an excitation source according to an operating sequence;
• controlling an electrical power source according to the operating sequence;
• wherein the operating sequence comprises a plurality of phases, in each phase thereof:
• an excitation pulse directed at a target is generated by the excitation source to excite a plasma discharge at the target;
• a first electrical power pulse is generated by the electrical power source to electrically supply the plasma discharge by the target;
• and,
• a second electrical power pulse is generated by the electrical power source to accelerate a stream of material released from the target by the plasma discharge away from the target and toward a substrate holder;
• wherein the plurality of phases comprise one or more than one first phase, in which the first electrical power pulse and an electrical current pulse associated with the second electrical power pulse overlap each other only partially.