Yttrium-based protective film, method for producing same, and member

Abstract

An yttrium-based protective film has a porosity of less than 1.5 volume %, a Young's modulus of 100.00 GPa or more, and a Vickers hardness of 8.50 GPa or more. A method for producing the yttrium-based protective film includes evaporating an evaporation source and depositing the evaporation source onto a substrate while irradiating with ions of at least one element selected from the group consisting of oxygen, argon, neon, krypton, and xenon from an ion gun in a vacuum. Y2O3 or a combination of Y2O3 and YF3 is used as the evaporation source.

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