Polishing composition and polishing method
AssigneeFujimi Incorporated
InventorRyota Mae
Life of this patent
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Abstract
The present disclosure provides a polishing composition which allows the polishing removal rate of a material having a silicon-silicon bond to be enhanced and which is also excellent in step height reduction ability on a polishing object including the material having a silicon-silicon bond. The present disclosure relates to a polishing composition including (A) a water-soluble polymer containing a lactam structure and (B) an amine compound, wherein the (B) component has 7 or more and less than 17 carbon atoms and a content mass ratio of the (B) component to the (A) component ((B) component/(A) component) is more than 1.
Claims11
A polishing composition comprising
- (A) a water-soluble polymer containing a lactam structure, and
- (B) an amine compound, wherein
- the (B) component has 7 or more and less than 17 carbon atoms, and
- a content mass ratio of the (B) component to the (A) component is more than 1.
Dependencies are inferred from the claim text.