Abrasive stick and polishing method
AssigneesTaimei Chemicals Co., Ltd., Xebec Technology Co., Ltd.
InventorsMakikazu KARASAWA, Shinnosuke YAMAZAKI, Yuki MARUYAMA
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Abstract
An abrasive stick (10) polishes a surface (S) to be polished of a workpiece (W) with a distal end portion (17) pressed against the surface (S) to be polished. The abrasive stick (10) includes inorganic filaments (15) and a resin impregnating the inorganic filaments (15) and cured. The inorganic filaments (15) contain 80 to 90% by weight of an alumina component and 20 to 10% by weight of a silica component. The inorganic filaments (15) have a crystal structure including mullite crystals and intermediate alumina. The mullite crystals have an average grain size smaller than 25 nm.
Claims8
An abrasive stick in a rod shape having a distal end portion pressed against a surface to be polished of a workpiece to polish the surface to be polished, the abrasive stick comprising:
- a plurality of inorganic filaments extending in an axial direction;
- and a resin impregnating the inorganic filaments and solidified, wherein
- cross sections of the inorganic filaments are exposed on a distal end surface of the abrasive stick,
- the abrasive stick has elasticity to flex in a direction intersecting the axial direction,
- the inorganic filaments comprise 80 to 90% by weight of an alumina component and 20 to 10% by weight of a silica component,
- the inorganic filaments have a crystal structure including mullite crystals and intermediate alumina,
- the mullite crystals have an average grain size smaller than 25 nm,
- a peak of a diffraction line of a (110) plane of mullite appears in a diffraction chart obtained by irradiating the inorganic filaments with X-rays, and
- the average grain size of the mullite crystals is calculated by the following formula based on the diffraction chart:
- D
- hkl
- =
- 0.9
- λ
- β
- 1
- 2
- ·
- cos
-
- θ
- [
- Math
- .
- 1
- ]
- Dhkl:
- an average grain size of a (210) plane
- λ:
- a wavelength of X-rays
- θ:
- a glancing angle of X-rays
- β1/2:
- a full width at half maximum of a diffraction line of the (210) plane of mullite in which a crystal structure 2θ by X-ray diffraction appears near 26°.
Dependencies are inferred from the claim text.