Plasma modification preparation method of silicon-carbon composite material, silicon-carbon composite material and use thereof

Abstract

The present invention discloses a plasma modification preparation method of a silicon-carbon composite material, and a silicon-carbon composite material and a use thereof. The preparation method includes at least operation steps of: S10). placing aminated porous carbon in a deposition chamber, introducing a silane gas into the deposition chamber, and depositing nano-silicon in the aminated porous carbon, to obtain a silicon-carbon precursor material; S20). transferring the silicon-carbon precursor material to a plasma method modification chamber, introducing a halogen gas in a plasma manner, and depositing generated halide ions on a surface of the silicon-carbon precursor material, to obtain a silicon-carbon precursor material coated with halogenated carbon; and S30). stopping introducing the halogen gas, and introducing a carbon source gas in the plasma manner, to obtain the silicon-carbon composite material. The obtained silicon-carbon composite material has a stable core-shell structure.

Dependencies are inferred from the claim text.