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US 2026/0285038 A1Published application
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsKoji OHASHI, Nobuaki ITO, Yasuaki HAMADA, Masao NAKAYAMA
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Abstract
A piezoelectric element includes: a lower electrode; a lower piezoelectric body including K, Na, and Nb; an upper piezoelectric body including K, Na, and Nb; and an upper electrode, in a combination of a specific layer among the M layers and a specific layer among the N layers, (I5-I6)/(I1-I2)<1.00 is satisfied and (I7-I8)/(I3-I4)<1.00 is satisfied.
Claims12
A piezoelectric element comprising:
- a lower electrode;
- a lower piezoelectric body that includes K, Na, and Nb and is formed of M(M≥1) layers;
- an upper piezoelectric body that includes K, Na, and Nb and is formed of N(N≥1) layers;
- and
- an upper electrode, wherein
- the lower electrode, the lower piezoelectric body, the upper piezoelectric body, and the upper electrode are provided to be arranged in this order in a lamination direction,
- in each of the lower piezoelectric body of the M layers and the upper piezoelectric body of the N layers, a concentration of each of K and Na fluctuates along the lamination direction to have extreme values in the layer,
- when each of the M layers is measured by SIMS along the lamination direction, a maximum value of a K intensity is represented by I1, a minimum value of a K intensity is represented by I2, a maximum value of an Na intensity is represented by I3, and a minimum value of an Na intensity is represented by I4,
- when each of the N layers of the upper piezoelectric body is measured by SIMS along the lamination direction, a maximum value of a K intensity is represented by I5, a minimum value of a K intensity is represented by I6, a maximum value of an Na intensity is represented by I7, and a minimum value of an Na intensity is represented by I8, and
- in a combination of a specific layer among the M layers and a specific layer among the N layers, (I5-I6)/(I1-I2)<1.00 is satisfied, and
- (I7-I8)/(I3-I4)<1.00 is satisfied.
8 more elements
Dependencies are inferred from the claim text.