Three-dimensional robotic calibration device

A method to calibrate an existing semiconductor production facility Equipment Front End Module (EFEM) control computer's digital three-dimensional positional mapping of the EFEM interior walls, comprising the steps of:

• affixing a horizontal, long range first LiDAR sensor to an EFEM's robotic arm;
• affixing a horizontal and vertical, short range second LiDAR sensor to said robotic arm such that a scanning pattern of said first and said second LiDAR sensors overlap within the confines of said EFEM, and face toward an end effector of said robotic arm;
• moving said robotic arm around said EFEM and along a robotic track while said first and said second LiDAR sensors scan all said interior walls and load ports of said EFEM, developing a three-dimensional point cloud of said EFEM interior walls and load ports from the point of reference of the robotic arm;
• providing said three-dimensional point cloud to an EFEM calibration program in said module control computer;
• providing a location dimensional data from a robotic track encoder and robotic arm position sensors to said EFEM calibration program;
• algorithmically reconciling said point cloud and said dimensional data with an initial factory mapping of said EFEM interior walls to establish a new three-dimensional mapping of said EFEM interior walls that accounts for the degree of parallelism of the robotic track, the three-dimensional location of all EFEM interior walls, and the precise size, location and elevation of the load port openings;
• and
• providing said new three-dimensional mapping to a robotic arm positioning program in said EFEM control computer to enable the generation of accurate and precise three-dimensional position instructions to said robotic arm.