Decontamination material and manufacturing method thereof, and method of cleaning probe

Abstract

A decontamination material including a support layer and a cleaning layer is provided. The cleaning layer is disposed on the support layer. The cleaning layer is made of resin, a plurality of cleaning particles dispersed in the resin, a plurality of abrasive particles dispersed in the resin, and a plurality of hollow polymer microspheres dispersed in the resin. The cleaning particles have a Mohs hardness of less than 7. The abrasive particles have a Mohs hardness of greater than or equal to 7. A manufacturing method of a decontamination material and a method of cleaning a probe are also provided.

Dependencies are inferred from the claim text.