Polishing pad
AssigneesHubei Dinghui Microelectronics Materials Co., Ltd, Hubei Dinglong Co., Ltd.
InventorsYijie LUO, Bo CHEN, Jiping ZHANG, Yue GAO, Min LIU, Longdan CAI
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AssigneesHubei Dinghui Microelectronics Materials Co., Ltd, Hubei Dinglong Co., Ltd.
InventorsYijie LUO, Bo CHEN, Jiping ZHANG, Yue GAO, Min LIU, Longdan CAI
Estimating the term…
A polishing pad includes a polishing layer. The polishing layer includes a polyurethane obtained by reacting a multifunctional isocyanate, a polyol composition, and a polyamine composition. The polyamine composition includes one and/or more of diamines and/or triamines and/or polyamines with more than 3 aminos. An average molecular weight of the polyamine composition is between 200 and 400. An average functionality of the polyamine composition is greater than 2 and not higher than 2.20. Proportions of the diamines and the triamines relative to the total amount of the polyamine composition are 77%-96%:3%-12%, respectively, in the polyamine composition.
A polishing pad, comprising a polishing layer, wherein the polishing layer comprises a polyurethane obtained by reacting a multifunctional isocyanate, a polyol composition, and a polyamine composition, wherein the polyamine composition comprises one or more of diamines, triamines or polyamines with more than 3 aminos, an average molecular weight of the polyamine composition is between 200 and 400, and an average functionality of the polyamine composition is greater than 2 and not higher than 2.20, and
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A polyamine composition, comprising one or more of diamines, triamines or polyamines with more than 3 aminos, wherein an average molecular weight of the polyamine composition is between 200 and 400, an average functionality of the polyamine composition is greater than 2 and not higher than 2.20, and
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A polishing pad, comprising a polishing layer, wherein the polishing layer comprises a polyurethane obtained by reacting a multifunctional isocyanate, a polyol composition, and a polyamine composition, and wherein in a liquid chromatogram obtained by a liquid chromatography analysis of the polyamine composition under following conditions,
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Dependencies are inferred from the claim text.