Laser irradiation method, laser irradiation device, laser marking device, and fabricating apparatus
OwnerTakuei NISHIO, Muneaki IWATA +1inventors
InventorsTakuei NISHIO, Muneaki IWATA, Keiichi SERIZAWA
Life of this patent
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Abstract
A laser irradiation method includes causing a first deflector to deflect a laser beam, causing a second deflector to raster-scan an object with the laser beam deflected by the first deflector, the object having an irradiation region and a non-irradiation region separated from the irradiation region, and causing the first deflector to deflect the laser beam, which is moved to the non-irradiation region by the second deflector, to the irradiation region to irradiate the irradiation region with the laser beam.
Claims17
A laser irradiation method comprising:
- causing a first deflector to deflect a laser beam;
- causing a second deflector to raster-scan an object with the laser beam deflected by the first deflector, the object having an irradiation region and a non-irradiation region separated from the irradiation region;
- and
- causing the first deflector to deflect the laser beam, which is moved to the non-irradiation region by the second deflector, to the irradiation region to irradiate the irradiation region with the laser beam.
A laser marking method comprising:
- causing a first deflector to deflect a laser beam in a first direction;
- causing a second deflector to raster-scan an object with the laser beam deflected by the first deflector at a scanning speed, the object having an irradiation region and a non-irradiation region separated from the irradiation region;
- and
- causing the first deflector to deflect the laser beam, which is moved to the non-irradiation region by the second deflector, to the irradiation region to irradiate the irradiation region with the laser beam when the second deflector accelerates or decelerates the scanning speed.
A laser irradiation device comprising:
- a first deflector to deflect a laser beam;
- and
- a second deflector to raster-scan an object, having an irradiation region and a non-irradiation region separated from the non-irradiation region, with the laser beam deflected by the first deflector,
- wherein the first deflector deflects the laser beam, which is moved to the non-irradiation region by the second deflector, to the irradiation region to irradiate the irradiation region with the laser beam.
A laser marking device comprising:
- a first deflector to deflect a laser beam;
- and
- a second deflector to raster-scan an object having an irradiation region and a non-irradiation region separated from the irradiation region at a scanning speed,
- wherein the first deflector deflects the laser beam, which is moved to the irradiation region or the non-irradiation region by the second deflector, to the irradiation region to irradiate the irradiation region with the laser beam when the second deflector accelerates or decelerates the scanning speed.
Dependencies are inferred from the claim text.