Laser irradiation apparatus, laser processing apparatus, method for laser processing, method for installing mask, method for installing laser processing apparatus, and mask
AssigneeShin-Etsu Engineering Co., Ltd.
InventorsYoshikazu OHTANI, Hiroshi YAMAOKA, Masami KURATA, Taketo USAMI
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Abstract
The present disclosure provides a laser irradiation apparatus including a first optical functional unit including a laser source, and the second optical functional unit for installing the mask having a pattern corresponding to a laser irradiation region of the body to be irradiated.
Claims20
A laser irradiation apparatus for irradiating a body to be irradiated with a laser through a mask installed in a second optical functional unit, the apparatus comprising:
- a first optical functional unit comprising a laser source;
- and
- the second optical functional unit for installing the mask having a pattern corresponding to a laser irradiation region of the body to be irradiated, wherein
- the mask includes an effective area having the pattern corresponding to the laser irradiation region of the body to be irradiated, and is a quadrilateral having an outer edge of the mask formed by four sides, a longest side of which has a length of 800 mm or more, and
- the mask is arranged such that a normal to a surface on which the pattern is formed is oriented in a substantially horizontal direction in the second optical functional unit.
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A method for installing a mask to install the mask in a laser irradiation apparatus for irradiating a body to be irradiated with a laser through the mask installed in a second optical functional unit, the laser irradiation apparatus comprising:
- a first optical functional unit comprising a laser source;
- and
- the second optical functional unit for installing the mask having a pattern corresponding to a laser irradiation region of the body to be irradiated, wherein
- the mask being used is a quadrilateral having an outer edge formed by four sides, a longest side of which has a length of 800 mm or more, and
- the mask is installed in the second optical functional unit such that a normal to a surface on which the pattern is formed is oriented in a substantially horizontal direction.
A mask to be vertically installed in a laser irradiation apparatus, the mask having a quadrilateral shape and comprising an effective area that has a pattern corresponding to a laser irradiation region of a body to be irradiated, wherein
- a longest side among four sides of the quadrilateral has a length of 800 mm or more.
Dependencies are inferred from the claim text.