Laser irradiation apparatus and laser processing apparatus

A laser irradiation apparatus, comprising:

• a laser irradiation unit including a first laser element configured to emit a first light beam and a second laser element configured to emit a second light beam, and configured to emit laser light in which the first light beam and the second light beam are converged toward a convergence point;
• a light receiving unit including a first light receiving element configured to receive the first light beam and a second light receiving element configured to receive the second light beam;
• a moving mechanism configured to change a relative position between the laser irradiation unit and the light receiving unit;
• and
• a controller configured to control driving of the laser irradiation unit and the moving mechanism, wherein
• the first laser element and the second laser element are disposed at positions different from each other in a plan view of the laser irradiation unit from the convergence point,
• a position at which the light receiving unit receives the laser light emitted from the laser irradiation unit is different from the convergence point in an arrangement direction in which the laser irradiation unit and the light receiving unit are arranged when the laser irradiation unit and the light receiving unit face each other,
• in a plan view of the light receiving unit along the arrangement direction, a first position at which the first light receiving element receives the first light beam and a second position at which the second light receiving element receives the second light beam are different from each other, and
• the controller irradiates the light receiving unit with the laser light in a state in which the laser irradiation unit and the light receiving unit face each other and corrects an output of the laser light based on a light reception result of the light receiving unit.