Cleaning method for substrate accommodation container and cleaning apparatus for substrate accommodation container
AssigneesKioxia Corporation, Shibaura Mechatronics Corporation
InventorsTae KAMINO, Naoki KANDA, Jin OTONARI, Hiroshi TOMITA, Yukinobu NISHIBE, Yotaro FUKUOKA, Hisaaki MIYASAKO, Junji ISHIHARA
Life of this patent
Estimating the term…