Package structure and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Siang Lin, Chia-Hung Liu, Ming-Fa CHEN
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Siang Lin, Chia-Hung Liu, Ming-Fa CHEN
Estimating the term…
Provided is a package structure and a method of forming the same. The method includes bonding a first integrated circuit component onto an interposer, wherein the first integrated circuit component has a recess filled with a sacrificial material therein; forming an underfill layer on the interposer to laterally surround the first integrated circuit component; forming an encapsulant on the interposer to laterally encapsulate the underfill layer and the first integrated circuit component; removing a portion of the encapsulant to expose the sacrificial material within the recess of the first integrated circuit component; and removing the sacrificial material to expose the recess of the first integrated circuit component.
A method of forming a package structure, comprising:
A package structure, comprising:
A package structure, comprising:
Dependencies are inferred from the claim text.