US 2026/0282986 A1 · SYSTEM INCLUDING AT LEAST TWO DIFFERENT TYPES OF FLEXURES

Abstract

A system can include different types of flexures. In a non-limiting implementation, one of the flexures can include a guiding flexure, and another flexure can include a decoupling flexure. The guiding flexure can allow translation of a movable object in a desired direction. The decoupling flexure can help to reduce movement in undesired directions and rotational movement. In the same or different implementation, an actuator system can include an actuator that is coupled to the flexures. The actuator system can be incorporated as a sub-assembly into a larger system. In an implementation, the larger system may be a die bonding system. A method of using the die bonding system can allow for the position of a movable platform to allow for more precise positioning of a die to a die bonding site of a bonding substrate.

Claims21

Dependent claims

A die bonding system comprising:

a first frame;
a first movable platform adapted to retain a first die chuck;
a first actuator for moving the first movable platform relative to the first frame, wherein the first actuator includes:
a first fixed portion attached to the first frame;
and
a first moving portion that is adapted to supply a first force in a first direction relative to the first fixed portion;
a first flexure with a first degree of freedom in the first direction and is connected to the first moving portion of the first actuator and the first frame;
and
a second flexure with a plurality of degrees of freedom in directions other than the first direction and is connected to the first moving portion of the first actuator and the first movable platform.

6 more elements

Dependencies are inferred from the claim text.

System including at least two different types of flexures

Life of this patent

System including at least two different types of flexures

Life of this patent

Abstract

Claims21