Conductive via structures for gate contact or trench contact
AssigneeIntel Foundry IP LLC
InventorsLeonard P. GULER, Tahir GHANI, Charles H. WALLACE
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AssigneeIntel Foundry IP LLC
InventorsLeonard P. GULER, Tahir GHANI, Charles H. WALLACE
Estimating the term…
Conductive via structures for gate contact or trench contact are described. In an example, an integrated circuit structure includes a plurality of gate structures. A plurality of dielectric spacers has an uppermost surface co-planar with an uppermost surface of a plurality of gate structures and co-planar with an uppermost surface of a plurality of conductive trench contact structures. A dielectric layer is over the plurality of gate structures, over the plurality of conductive trench contact structures, and over the plurality of dielectric spacers. The dielectric layer has a planar uppermost surface. An opening is in the dielectric layer, the opening exposing one of the plurality of gate structures or one of the plurality of conductive trench contact structures. A conductive via is in the opening. The conductive via has an uppermost surface co-planar with the planar uppermost surface of the dielectric layer.
An integrated circuit structure, comprising:
An integrated circuit structure, comprising:
A computing device, comprising:
Dependencies are inferred from the claim text.