System and method for adaptive semiconductor process control

A method for controlling semiconductor manufacturing equipment, the method comprising:

• collecting multi-modal process data according to a dynamic measurement strategy using a plurality of sensors;
• maintaining a state model using particle-based estimation from the multi-modal process data;
• generating topology-aware features from the state model;
• maintaining a knowledge graph integrating process relationships and economic factors;
• implementing an upper confidence tree (UCT) optimization algorithm with super-exponential regret bounds;
• generating real-time control signals based on the optimization algorithm;
• and
• adaptively adjusting the semiconductor manufacturing equipment based on the control signals.

A method for automated equipment retargeting in semiconductor manufacturing, comprising:

• collecting multi-modal sensor data through a dynamic measurement strategy that includes just-in-context, just-in-time, and just-in-place data acquisition;
• accessing a knowledge graph storing node-specific calibration profiles and process parameters for multiple technology nodes;
• executing an advanced scheduling algorithm to determine an optimal requalification window and retarget equipment from a first technology node to a second technology node;
• loading partial calibration vectors and reference recipes retrieved from the knowledge graph corresponding to the second technology node;
• employing a particle-based state estimation subsystem that tracks multi-hypothesis tool states during the transition, adaptively resampling to converge on new process parameters;
• applying an upper confidence tree (UCT) optimization engine with super-exponential regret bounds to balance exploration of recalibration actions and exploitation of historical best-known methods;
• and
• generating real-time control signals to finalize the retargeting and initiate high-volume production at the second technology node, wherein the re-ramp time is reduced compared to traditional node transition processes.