Electrostatic chuck and substrate fixing device

Abstract

An electrostatic chuck includes an adsorption part that adsorbs and holds a substrate, which is an adsorption target object, and a heating part stacked on the adsorption part. The heating part includes a first layer including a first heating body. The heating part includes a second layer stacked on the first layer and including a second heating body and a connection pattern electrically connected to the first heating body. The heating part includes a third layer stacked on the second layer and including a power supply portion electrically connected to the connection pattern. The first heating body includes a plurality of heating elements independently arranged for each of a plurality of zones. The second heating body and the connection pattern are provided on the same planar surface. An electrical resistivity of the connection pattern is lower than that of the second heating body.

Dependencies are inferred from the claim text.