Substrate processing system, substrate processing method, and non-transitory computer-readable storage medium

A substrate processing system, comprising:

• a process module having a chamber and a substrate support disposed in the chamber, the process module performing substrate processing on a substrate on the substrate support;
• a transfer module including a transfer robot transferring the substrate to a transfer position on the substrate support;
• a camera having a field of view including a transfer path of the substrate, the camera acquiring an image of the substrate;
• processing circuitry including:
• a detector configured to detect, from an image of the substrate on which the substrate processing has been performed, a first characteristic pattern having a center that reflects a center position of the substrate, and a second characteristic pattern having a center that reflects a center position of the substrate support during the substrate processing;
• a calculator configured to calculate a positional relationship between a position of the substrate support and a position of the substrate during the substrate processing, based on the first characteristic pattern and the second characteristic pattern;
• and
• transfer controller circuitry configured to correct the transfer position for the transfer module based on the positional relationship.