Substrate Processing Apparatus and Method of Operating Substrate Processing Apparatus
AssigneeTokyo Electron Limited
InventorHideaki Kubo
Life of this patent
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Abstract
There is a substrate processing apparatus includes a processing module, a transfer module, and a controller. The processing module includes a placing table on which a substrate is placed, and a processing chamber that accommodates the placing table. The processing module is configured to perform processing on the substrate placed on the placing table. The transfer module includes a transfer mechanism configured to transfer the substrate onto the placing table. The controller controls the transfer mechanism to place a cover member on the placing table when an idle time period, during which processing on the substrate is not performed in the processing module, exceeds a first time period.
Claims19
A substrate processing apparatus comprising:
- a processing module including a placing table on which a substrate is placed, and a processing chamber that accommodates the placing table, the processing module being configured to perform processing on the substrate placed on the placing table;
- a transfer module including a transfer mechanism configured to transfer the substrate onto the placing table;
- and
- a controller;
- wherein the controller controls the transfer mechanism to place a cover member on the placing table when an idle time period, during which processing on the substrate is not performed in the processing module, exceeds a first time period.
A method of operating a substrate processing apparatus including a processing module and a transfer module,
- wherein the processing module includes a placing table on which a substrate is placed, and a processing chamber that accommodates the placing table, and is configured to perform processing on the substrate placed on the placing table,
- the transfer module includes a transfer mechanism configured to transfer the substrate onto the placing table, and
- when an idle time period, during which processing on the substrate is not performed in the processing module, exceeds a first time period, the transfer mechanism places a cover member on the placing table.
Dependencies are inferred from the claim text.