Turntable for wafer transport system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsGuancyun Li, Ching-Jung Chang, Chi-Feng Tung
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsGuancyun Li, Ching-Jung Chang, Chi-Feng Tung
Estimating the term…
A system according to the present disclosure includes a first fixed rail segment, a second fixed rail segment aligned with the first fixed rail segment along a first direction, a rotatable rail joint disposed between the first fixed rail segment and the second fixed rail segment along the first direction, a hanger mechanically coupled to the rotatable rail joint, a powered rotational mechanism housed in the hanger. The rotatable rail joint includes at least one rotational rail that is aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates to an alignment position is not aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates out of the alignment position.
An apparatus, comprising:
An apparatus, comprising:
A method, comprising:
Dependencies are inferred from the claim text.