Handling panel substrates
AssigneeApplied Materials, Inc.
InventorsAlejandro Lizarraga MALDONADO, Harish PENMETHSA, Vasu R. CHINTALA, Manohar KORLAPATI
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AssigneeApplied Materials, Inc.
InventorsAlejandro Lizarraga MALDONADO, Harish PENMETHSA, Vasu R. CHINTALA, Manohar KORLAPATI
Estimating the term…
Apparatuses and methods for processing substrates are provided herein. In some embodiments disclosed herein, a processing system includes a processing chamber comprising one or more of a rotating base for receiving a panel substrate, wherein the rotating base is capable of adjusting an orientation of the panel substrate, and a set of sensors, a transportation mechanism capable of transporting the panel substrate into or out of the processing chamber or adjusting a translational position of the panel substrate, and a computing device capable of receiving sensor data from the set of sensors and computing, based on the sensor data, a rotational correction to adjust an orientation of the panel substrate to be performed by the rotating base or a translational correction to adjust a translational position of the panel substrate to be performed by the transportation mechanism.
A semiconductor processing device, comprising:
A method, comprising:
Dependencies are inferred from the claim text.