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US 2026/0282804 A1Published application
Electrostatic chuck
AssigneeToto Ltd.
InventorsYuki SASAKI, Jun SHIRAISHI, Ikuo ITAKURA, Rui IMOTO, Shunya MIYAZAKI
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Abstract
An electrostatic chuck 10 includes a dielectric substrate 100 including a placement surface, and a plurality of conductor layers provided at mutually different height positions inside the dielectric substrate 100. When a total thickness of the respective conductor layers is defined as sd (μm) and a thickness of the dielectric substrate 100 is defined as D (mm), the electrostatic chuck 10 satisfies the following condition: sd <-10.5×D +74.5.
Claims6
An electrostatic chuck comprising:
- a dielectric substrate including a placement surface on which an object to be processed is placed;
- and
- a plurality of conductor layers provided at mutually different height positions inside the dielectric substrate, wherein when a total thickness of the respective conductor layers is defined as sd (μm) and a thickness of the dielectric substrate is defined as D (mm),
- the following condition:
- sd<−10.5×D+74.5 is satisfied.
2 more elements
Dependencies are inferred from the claim text.