Systems and methods for metallic deionization
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Wei Chao, Shu-Yen Wang
Life of this patent
Estimating the term…
Abstract
In some embodiments, the present disclosure relates to a method. The method includes determining a first metal ion concentration of a tank solution within a tank at a first time. A first iteration of remediation to the tank solution is performed in response to a first determination that the first metal ion concentration is greater than a threshold value. A second metal ion concentration of the tank solution within the tank is determined at a second time after performing the first iteration of remediation. A second iteration of remediation to the tank solution is performed in response to a second determination that the second metal ion concentration is greater than the threshold value.
Claims20
A method, comprising:
- determining a first metal ion concentration of a tank solution within a tank at a first time;
- performing a first iteration of remediation to the tank solution in response to a first determination that the first metal ion concentration is greater than a threshold value;
- determining a second metal ion concentration of the tank solution within the tank at a second time after performing the first iteration of remediation;
- and
- performing a second iteration of remediation to the tank solution in response to a second determination that the second metal ion concentration is greater than the threshold value.
A method, comprising:
- determining a first metal ion concentration of a metal ion within a tank solution disposed in a tank;
- selecting a threshold value that comprises a same elemental identity as the metal ion from a group of a plurality of threshold values individually corresponding to concentration values of metal ions of different elemental identities;
- determining whether the first metal ion concentration of the tank solution exceeds the threshold value;
- and
- performing a first iteration of a remediation process if the threshold value is exceeded, wherein the first iteration of the remediation process changes the first metal ion concentration of the tank solution.
A method, comprising:
- determining a first metal ion concentration of a tank solution within a tank;
- determining if the first metal ion concentration violates a threshold condition, wherein the threshold condition is determined by utilizing statistical analysis of an aggregation of x-ray sensor data;
- and
- performing a first iteration of remediation on the tank solution in response to a first determination that the first metal ion concentration violates the threshold condition, wherein the first iteration of remediation achieves a second metal ion concentration within the tank solution that is different than the first metal ion concentration.
Dependencies are inferred from the claim text.